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Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Brooks
®
Digital MFC's & MFM's
Brooks
®
SLA5800 Series
Elastomer Sealed, Digital,
Thermal Mass Flow Meters and Controllers
Model SLA5850
with RS485 Communications
Model SLA5850
with DeviceNet
®
Communications
Model SLA5850
with Profibus
®
Communications
Model SLA5851
with EtherCAT
®
Communications
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Brooks
®
Digital MFC's & MFM's
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed
during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,
removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components
that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these
devices. Damaged components, even though they appear to function properly, exhibit early failure.
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover
for local sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can
result in serious personal injury and / or damage to the equipment.
Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use
replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualified persons.
WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely
drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).
The Specifications Section of this manual contains instructions related to the PED directive.
Products described in this manual are in compliance with EN directive 2014/34/EU.
All Brooks Instrument Flowmeters fall under fluid group 1.
Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic
Compatibility (EMC directive 2014/30/EU).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.
The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
European Pressure Equipment Directive (PED)
European Electromagnetic Compatibility (EMC)
Essential Instructions
Read before proceeding!
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Brooks
®
Digital MFC's & MFM's
Dear Customer,
We appreciate this opportunity to service your flow measurement and control requirements with a Brooks
Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their
gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for
various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,
analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Brooks
®
Digital MFC's & MFM's
THIS PAGE WAS
INTENTIONALLY
LEFT BLANK
i
Brooks
®
Digital MFC's & MFM's
Contents
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope .........................................................................................................................................1-1
1-2 Purpose......................................................................................................................................1-1
1-3 Description .................................................................................................................................1-1
1-4 Specifications .............................................................................................................................1-2
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment.................................................................................................................2-1
2-3 Recommended Storage Practice ...............................................................................................2-1
2-4 Return Shipment ........................................................................................................................2-1
2-5 Transit Precautions ....................................................................................................................2-2
2-6 Removal from Storage ...............................................................................................................2-2
2-7 Gas Connections........................................................................................................................2-2
2-8 In-Line Filter ...............................................................................................................................2-2
2-9 Installation ..................................................................................................................................2-3
2-10 Electrical Interface......................................................................................................................2-5
2-11 Operation Check Procedure (Analog I/O) ..................................................................................2-9
2-12 Operation Check Procedure (Digital I/O)...................................................................................2-10
2-13 Bus/Network (DeviceNet, Profibus, Foundation Fieldbus, EtherCAT).......................................2-10
Section 3 Operation
3-1 Overview ....................................................................................................................................3-1
3-2 Theory of Operation for Flow Measurement ..............................................................................3-1
3-3 Features .....................................................................................................................................3-3
3-4 Analog I/O Mode of Operation....................................................................................................3-4
3-5 Communications Features .........................................................................................................3-5
3-5-1 RS485 Communications Features (Analog versions only) .........................................................3-5
3-5-2 DeviceNet Communications Features........................................................................................3-6
3-5-3 Profibus Communications Features ...........................................................................................3-6
3-5-4 EtherCAT Communications Features.........................................................................................3-6
3-6 Alarms (Analog versions only)....................................................................................................3-7
3-6-1 Alarms (Analog versions only) Configuration Attributes .............................................................3-8
3-6-2 Diagnostic Alarms (Analog versions only) ..................................................................................3-9
3-6-3 General Alarms (Analog versions only) ......................................................................................3-9
3-7 Calibration/Configuration Sets...................................................................................................3-10
3-8 Special Features .......................................................................................................................3-10
3-8-1 Setpoint Ramping......................................................................................................................3-11
3-8-2 Low Setpoint Command Cutoff .................................................................................................3-11
3-8-3 Low Flow Output Cutoff.............................................................................................................3-11
3-8-4 Adaptive Control........................................................................................................................3-11
3-8-5 Flow Totalizer ............................................................................................................................3-11
3-9 PC-based Support Tools ...........................................................................................................3-11
ii
Brooks
®
Digital MFC's & MFM's
Contents Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Section 4 Maintenance & Troubleshooting
4-1 Maintenance and Troubleshooting .............................................................................................4-1
4-1-1 Troubleshooting Analog or Digital...............................................................................................4-2
4-1-2 System Checks ..........................................................................................................................4-3
4-1-3 Cleaning Procedures..................................................................................................................4-6
4-1-4 Calibration Procedure ................................................................................................................4-6
Section A Essential Instructions ............................................................................................................ A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
Figures
Figure Page
Number Number
1-1 General Wiring ...........................................................................................................................1-6
1-2 Response Performance of Brooks Digital MFC .........................................................................1-7
1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5%
Per Second Setpoint Change.....................................................................................................1-7
1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts.................................................1-8
1-5 SLA5800 Series Profibus Connections and Pinouts ..................................................................1-9
1-6 SLA5800 Series DeviceNet Connections and Pinouts ..............................................................1-10
1-7 SLA5800 Series EtherCAT Connections and Pinouts ...............................................................1-11
1-8 Dimensions - Model SLA5850, Thru-Flow, RS485....................................................................1-12
1-9 Dimensions - Model SLA5850, Downport, RS485.....................................................................1-12
1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT ...............................................................1-13
1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet ..............................................................1-13
1-12 Dimensions - Model SLA5860, Thru-Flow, Profibus..................................................................1-14
1-13 Dimensions - Model SLA5860, Thru-Flow, RS485....................................................................1-14
1-14 Dimensions - Model SLA5861, Thru-Flow, RS485....................................................................1-15
1-15 Dimensions - Model SLA5863, Thru-Flow, DeviceNet ..............................................................1-15
1-16 Dimensions - Model SLA5853, Thru-Flow, Profibus..................................................................1-16
1-17 Dimensions - Model SLA5853, Thru-Flow, EtherCAT ...............................................................1-16
2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version .............................2-6
2-2 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ...........2-7
2-3 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) ...................2-7
2-4 RS485 Multidrop Interconnection TMFs and PC........................................................................2-8
3-1 Flow Sensor Operational Diagram (VCR
TM
End Connections Shown) .......................................3-2
3-2 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers ................................3-3
4-1 Bench Troubleshooting Circuit ...................................................................................................4-5
Tables
Table Page
Number Number
1-1 SLA5800 Series Specifications ..................................................................................................1-3
1-2 SLA5800 Series Electrical Specifications...................................................................................1-4
1-3 SLA5800 Series Certifications ...................................................................................................1-5
2-1 Recommended Filter Size..........................................................................................................2-2
4-1 Sensor Troubleshooting .............................................................................................................4-4
4-2 Troubleshooting..........................................................................................................................4-7
1-1
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
1-1 Scope
Thank you for purchasing a Brooks Instrument Mass Flow Product. This
manual, X-TMF-SLA5800-Series-RevB-MFC-eng is an installation and
operation manual for your instrument.
If you have purchased a Brooks
®
Digital Mass Flow Product with RS485,
DeviceNet
®
, Profibus
®
or EtherCAT
®
communicatons, a separate
Instruction Manual shall also be provided as part of the operating
documentation.
1-2 Purpose
The Brooks Digital Products are mass flow measurement devices
designed for accurately measuring (MFM's) and rapidly controlling (MFC's)
flows of gases. This instruction manual is intended to provide the user with
all the information necessary to install, operate and maintain the Brooks
MFC and MFM. This manual is organized into the following sections.
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance
Section A Essential Instructions
Back Cover Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these Brooks Digital products.
1-3 Description
The SLA5800 Series provides a highly configurable platform based on a
simple modular architecture. The SLA5800 Series feature set was carefully
selected to enable drop-in replacement and upgrade of many brands of
mass flow controllers. With the wide range of options and features
available, the SLA5800 Series provides users with a single platform to
support a broad range of applications.
Industrial Multi-gas/Multi-range Capabilities
The SLA5800 Series allows multi-gas and multi-range capabilities to
reduce customer inventory. Storage and pre-programming of up to 6 gas
calibrations easily permits users to switch between different gasses and
ranges on a single device
Wide Flow Range
The SLA5800 Series covers an extremely broad range of flow rates. Model
SLA5850 can have a full scale flow as low as 3 ccm. With a high turndown
ratio of 100:1 for any full scale range from 1-50 lpm N2 equivalent and 50:1
turndown for all other flow rates, accurate gas flow can be measured or
controlled down to 0.06 ccm! Model SLA5853 can monitor or control gas
flows up to 2500 lpm
Fast Response Performance
The all-digital electronics and superior mechanical configuration in the
1-2
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
SLA5800 Series provide for ultra fast response characteristics.
Broad Array of Communication Options
Brooks offers traditional 0-5 volt and 4-20mA analog options as well as
RS485 digital communications (“S-protocol”, based on HART). Brooks also
offers control interfaces via digital network protocols like DeviceNet, a high
speed (up to 500k baud) digital communication network, Profibus and
EtherCAT. Brooks' communication capabilities and device-profiles have
been certified by the ODVA (Open DeviceNet Vendor's Association) and
the ITK (Interoperability Test Kit). Other network protocols are in
development. Talk to your Brooks representative about your specific
needs.
Advanced Thermal Flow Measurement Sensor
Brooks' sensor technology combines:
• Excellent signal to noise performance for improved accuracy at low
setpoints
• Superior long-term stability through enhanced sensor manufacturing and
burn in process
• Isothermal packaging to reduce sensitivity to external temperature
changes
• Corrosion resistant sensor flow path
Advanced Diagnostics
The mass flow controller remains the most complex and critical component
in gas delivery systems. When dealing with highly toxic or corrosive gases,
removing the mass flow controller to determine if it is faulty should be the
last resort. In response to this, Brooks pioneered smarter mass flow
controllers with embedded self test routines and introduced an
independent diagnostic/service port to provide the user with a simple
interface, for troubleshooting without disturbing flow controller operation.
1-4 Specifications (Reference Tables 1-1 and 1-2)
1-3
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Table 1-1 SLA5800 Series Specifications
SLA5850/60SLA5850/60
SLA5850/60SLA5850/60
SLA5850/60
SLA5851/61SLA5851/61
SLA5851/61SLA5851/61
SLA5851/61
SLA5853/63SLA5853/63
SLA5853/63SLA5853/63
SLA5853/63
* Response time can be improved upon request
Flow Ranges and PrFlow Ranges and Pr
Flow Ranges and PrFlow Ranges and Pr
Flow Ranges and Pr
essuressur
essuressur
essur
e Ratings:e Ratings:
e Ratings:e Ratings:
e Ratings:
Mass FlowMass Flow
Mass FlowMass Flow
Mass Flow
Mass FlowMass Flow
Mass FlowMass Flow
Mass Flow
Flow RangesFlow Ranges
Flow RangesFlow Ranges
Flow Ranges
Pressure UnitPressure Unit
Pressure UnitPressure Unit
Pressure Unit
PED Module HPED Module H
PED Module HPED Module H
PED Module H
ControllerController
ControllerController
Controller
MeterMeter
MeterMeter
Meter
N2 Eq. RatingsN2 Eq. Ratings
N2 Eq. RatingsN2 Eq. Ratings
N2 Eq. Ratings
psi/barpsi/bar
psi/barpsi/bar
psi/bar
CategoryCategory
CategoryCategory
Category
ModelModel
ModelModel
Model
ModelModel
ModelModel
Model
Min. F.S.Min. F.S.
Min. F.S.Min. F.S.
Min. F.S.
Max. F.S.Max. F.S.
Max. F.S.Max. F.S.
Max. F.S.
StandardStandard
StandardStandard
Standard
OptionalOptional
OptionalOptional
Optional
SLA5850 SLA5860 0.003 50 lpm 1500 psi/103 bar 4500 psi/310 bar SEP
SLA5851 SLA5861 15 200 lpm* 1500 psi/103 bar NA** SEP
SLA5853 SLA5863 100 2500 lpm 1000 psi/70 bar NA 1 for all 150 lb flanges
2 for all other connections
* 600 lpm of H2 possible with decreased accuracy ** 4500 psi/310 bar available as a special on the SLA5861 only
> 40 psig inlet required for flows greater than 100 lpm.
* Alarm modes are dependent on the communications interface. These are described in the corresponding digital communication interface manual.
** Hazardous area certifications have a temperature range limitation of 0-65°C.
PerformancePerformance
PerformancePerformance
Performance
Flow AccuracyFlow Accuracy
Flow AccuracyFlow Accuracy
Flow Accuracy
+0.9% of S.P. (20-100% F.S.), ±0.9% of S.P. (20-100% F.S.),
+0.18% of F.S. (2-20% F.S., 1-20% F.S. from 1-50 lpm)
±0.18% of F.S. (2-20% F.S.) up to 1100 lpm
±1.0% of F.S. from 1100 lpm
up to 2500 lpm
Control RangeControl Range
Control RangeControl Range
Control Range
100:1 for F.S. from 1-50 lpm (50:1 for all other F.S. flows)
Repeatability & ReproducibilityRepeatability & Reproducibility
Repeatability & ReproducibilityRepeatability & Reproducibility
Repeatability & Reproducibility 0.20% S.P.
LinearityLinearity
LinearityLinearity
Linearity Included in accuracy
Response Time (Response Time (
Response Time (Response Time (
Response Time (
Settling Time withinSettling Time within
Settling Time withinSettling Time within
Settling Time within < 1 second < 3 seconds
±2% F.S. for 0-100% command step)*±2% F.S. for 0-100% command step)*
±2% F.S. for 0-100% command step)*±2% F.S. for 0-100% command step)*
±2% F.S. for 0-100% command step)*
Zero StabilityZero Stability
Zero StabilityZero Stability
Zero Stability <
+ 0.2% F.S. per year
Temperature CoefficientTemperature Coefficient
Temperature CoefficientTemperature Coefficient
Temperature Coefficient
Zero: <0.05% of F.S. per °C. Span: <0.1% of S.P. per °C
Pressure CoefficientPressure Coefficient
Pressure CoefficientPressure Coefficient
Pressure Coefficient ±0.03% per psi (0-200 psi N2)
Attitude SensitivityAttitude Sensitivity
Attitude SensitivityAttitude Sensitivity
Attitude Sensitivity
<0.2% F.S. maximum deviation from specified accuracy after re-zeroing
RatingsRatings
RatingsRatings
Ratings
Operating Temperature RangeOperating Temperature Range
Operating Temperature RangeOperating Temperature Range
Operating Temperature Range -14 to 65
o
C (7 to 149
o
F)**
Minimum Pressure DifferentialMinimum Pressure Differential
Minimum Pressure DifferentialMinimum Pressure Differential
Minimum Pressure Differential 5 psi/0.35 bar 10 psi/0.69 bar Min.: 7.5 psi/0.52 bar at 500 lpm
(Controllers)(Controllers)
(Controllers)(Controllers)
(Controllers) Min.: 14.5 psi/1.00 bar at 1000 lpm
Min.: 35.0 psi/2.41 bar at 2500 lpm
Maximum Pressure DifferentialMaximum Pressure Differential
Maximum Pressure DifferentialMaximum Pressure Differential
Maximum Pressure Differential Application specific up to 50 psi/3.45 bar 300 psi/20.0 bar
(Controllers)(Controllers)
(Controllers)(Controllers)
(Controllers) 1500 psi/103.4 bar
Leak Integrity (external)Leak Integrity (external)
Leak Integrity (external)Leak Integrity (external)
Leak Integrity (external) 1x10
-9
atm. cc/sec He
MechanicalMechanical
MechanicalMechanical
Mechanical
Valve TypeValve Type
Valve TypeValve Type
Valve Type Normally Closed, Normally Open, Meter
Primary Wetted MaterialsPrimary Wetted Materials
Primary Wetted MaterialsPrimary Wetted Materials
Primary Wetted Materials 316L Stainless Steel, High Alloy Stainless Steel, Viton
®
fluoroelastomers, Buna-N, Kalrez
®
, Teflon
®
/Kalrez
®
, and EPDM
DiagnosticsDiagnostics
DiagnosticsDiagnostics
Diagnostics
Status LightsStatus Lights
Status LightsStatus Lights
Status Lights MFC Health, Network Status
Alarms*Alarms*
Alarms*Alarms*
Alarms*
Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic/Service PortDiagnostic/Service Port
Diagnostic/Service PortDiagnostic/Service Port
Diagnostic/Service Port RS485 via 2.5mm jack
1-4
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Table 1-2 SLA5800 Series Electrical Specifications
Communication ProtocolCommunication Protocol
Communication ProtocolCommunication Protocol
Communication Protocol
RS485RS485
RS485RS485
RS485
ProfibusProfibus
ProfibusProfibus
Profibus
®®
®®
®
DeviceNetDeviceNet
DeviceNetDeviceNet
DeviceNet
TMTM
TMTM
TM
EtherCATEtherCAT
EtherCATEtherCAT
EtherCAT
®®
®®
®
Electrical ConnectionElectrical Connection
Electrical ConnectionElectrical Connection
Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with
(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut
Sub-D (B) 2 x RJ45
Analog I/OAnalog I/O
Analog I/OAnalog I/O
Analog I/O 0-5 V, 1-5 V, 0-10 V, N/A 0-5V
0-20 mA, 4-20 mA
Power Max./PurgePower Max./Purge
Power Max./PurgePower Max./Purge
Power Max./Purge From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to
+27 Vdc +25 Vdc +27 Vdc
Power Requirements Watts, Max.Power Requirements Watts, Max.
Power Requirements Watts, Max.Power Requirements Watts, Max.
Power Requirements Watts, Max. Valve Orifice > 0.032”: 8 W Valve Orifice > 0.032”: 10 W Valve Orifice > 0.032”: 8.5 W
Valve Orifice 0.032”: 5 W Valve Orifice 0.032”: 7 W Valve Orifice 0.032”: 5.5 W
Without Valve: 2 W Without Valve: 4 W Without Valve: 2.5 W
Voltage Set Point Input SpecificationsVoltage Set Point Input Specifications
Voltage Set Point Input SpecificationsVoltage Set Point Input Specifications
Voltage Set Point Input Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A N/A
Full RangeFull Range
Full RangeFull Range
Full Range (-0.5)-11 Vdc N/A N/A
Absolute Max.Absolute Max.
Absolute Max.Absolute Max.
Absolute Max. 18 V (without damage) N/A N/A
Input ImpedenceInput Impedence
Input ImpedenceInput Impedence
Input Impedence >990 kOhms N/A N/A
Required Max. Sink CurrentRequired Max. Sink Current
Required Max. Sink CurrentRequired Max. Sink Current
Required Max. Sink Current 0.002 mA N/A N/A
Current Set Point Input SpecificationsCurrent Set Point Input Specifications
Current Set Point Input SpecificationsCurrent Set Point Input Specifications
Current Set Point Input Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 4-20 mA or 0-20 mA N/A N/A
Full RangeFull Range
Full RangeFull Range
Full Range 0-22 mA N/A N/A
Absolute Max.Absolute Max.
Absolute Max.Absolute Max.
Absolute Max. 24 mA (without damage) N/A N/A
Input ImpedenceInput Impedence
Input ImpedenceInput Impedence
Input Impedence 100 Ohms N/A N/A
Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Flow Output (Voltage) Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 0-5 Vdc, 1-5 Vdc or 0-10 Vdc N/A N/A
Full RangeFull Range
Full RangeFull Range
Full Range (-1)-11 Vdc N/A N/A
Min Load ResistanceMin Load Resistance
Min Load ResistanceMin Load Resistance
Min Load Resistance 2 kOhms N/A N/A
Flow Output (Current) SpecificationsFlow Output (Current) Specifications
Flow Output (Current) SpecificationsFlow Output (Current) Specifications
Flow Output (Current) Specifications
Nominal RangeNominal Range
Nominal RangeNominal Range
Nominal Range 0-20 mA or 4-20 mA N/A N/A
Full RangeFull Range
Full RangeFull Range
Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A
Max. LoadMax. Load
Max. LoadMax. Load
Max. Load 380 Ohms (for supply voltage: < 16 Vdc) N/A N/A
Analog I/O Alarm Ouput*Analog I/O Alarm Ouput*
Analog I/O Alarm Ouput*Analog I/O Alarm Ouput*
Analog I/O Alarm Ouput*
TypeType
TypeType
Type Open Collector N/A N/A
Max. Closed (On) CurrentMax. Closed (On) Current
Max. Closed (On) CurrentMax. Closed (On) Current
Max. Closed (On) Current 25 mA N/A N/A
Max. Open (Off) LeakageMax. Open (Off) Leakage
Max. Open (Off) LeakageMax. Open (Off) Leakage
Max. Open (Off) Leakage 1μA N/A N/A
Max. Open (Off) VoltageMax. Open (Off) Voltage
Max. Open (Off) VoltageMax. Open (Off) Voltage
Max. Open (Off) Voltage 30 Vdc N/A N/A
Analog I/O Valve Override Signal Specifications**Analog I/O Valve Override Signal Specifications**
Analog I/O Valve Override Signal Specifications**Analog I/O Valve Override Signal Specifications**
Analog I/O Valve Override Signal Specifications**
Floating/UnconnectedFloating/Unconnected
Floating/UnconnectedFloating/Unconnected
Floating/Unconnected Instrument controls valve to command set point N/A N/A
VOR < 0.3 VdcVOR < 0.3 Vdc
VOR < 0.3 VdcVOR < 0.3 Vdc
VOR < 0.3 Vdc Valve Closed N/A N/A
1 Vdc < VOR < 4 Vdc1 Vdc < VOR < 4 Vdc
1 Vdc < VOR < 4 Vdc1 Vdc < VOR < 4 Vdc
1 Vdc < VOR < 4 Vdc Valve Normal N/A N/A
VOR > 4.8 VdcVOR > 4.8 Vdc
VOR > 4.8 VdcVOR > 4.8 Vdc
VOR > 4.8 Vdc Valve Open N/A N/A
Input Impedence
Input Impedence
Input ImpedenceInput Impedence
Input Impedence 800 kOhms N/A N/A
Absolute Max. InputAbsolute Max. Input
Absolute Max. InputAbsolute Max. Input
Absolute Max. Input
(-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A
*The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active.
The Alarm Output may be set to indicate any one of various alarm conditions.
** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the
valve based upon the measured reading as shown in this section.
1-5
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Mark Agency Certification
Applicable
Standard Details
UL
(Recogonized)
Class I, Div 2, Group A, B, C, D
Class I, Zone 2, IIC T4
Class II, Zone 22
UL & CSA
Standards E73889 Vol 3, Sec 4
ATEX
II 3 G Ex nA IIC T4 Gc EN60079-0:2012
EN 60079-15:2010 KEMA 04ATEX 1118X
IECEx
II 3 G Ex nA IIC T4 Gc IEC 60079-0:2011
IEC 60079-15:2010 IECEx DEK 14.0072X
KOSHA Ex nA IIC T4
15-AV4BO-0641
15-AV4BO-0640
CE
EMC Directive 2014/30/EU
Directive 2011/65/EU
EN:61326-1:2013 EMC
RoHS
*ATEX/IECEx Special Conditions for safe use:
1. The module shall be installed in a suitable enclosure providing a degree of protection of
at least IP54 according to EN 60529 / IEC 60529, taking into account the environmental
conditions under which the equipment will be used.
2. When the temperature under rated condition exceeds 70 °C at the cable or conduit entry
point, or 80 °C at the branching point of the conductors, the temperature specification of
the selected cable shall be in compliance with the actual measured temperature values.
3. Provisions shall be made to prevent the rated voltage from being exceeded by transient
disturbances of more than 40%.
4. The equipment shall only be used in an area of not more than pollution degree 2, as
defined in IEC 60664-1.
Reference Conditions
Due to effects of pressure and temperature on the compressibility of
gases, specific reference conditions must be used when reporting
volumetric flow rates in mass flow terms. For example, the unit of measure
SCCM (standard cubic centimeters per minute) refers to a volumetric gas
flow at a standard reference condition, NOT the actual volumetric gas flow
at the actual operating pressure and temperature. The key point is that the
MASS FLOW of the gas is fixed, but the reference volumetric flow can be
reported differently based upon the standard reference condition used in
the calculation.
Throughout the world, there are differences in terminology when describing
reference conditions for gases. The words “normal conditions” and
“standard conditions” are sometimes used interchangeably to describe the
reference STP (Standard Temperature and Pressure) for gases. Further
note that temperature and pressure values for standard or normal
reference conditions vary in countries and industries worldwide. For
example, the Semiconductor Equipment Manufacturing Industry (SEMI)
defines standard temperature and pressure conditions as 273.15 K (0 °C)
and 101,325 Pa (760 torr). The main concern is that no matter what words
are used for descriptive purposes, a gas mass flow rate must have a
defined standard pressure and temperature reference condition when
performing a volumetric conversion.
Table 1-3 SLA5800 Series Certifications
1-6
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Fast Response Performance
The curves in Figure 1-2 depict the MFC output signal and actual
transitional flow to steady-state when gas flow enters into process
chamber, under a step response command condition.
Brooks devices also feature adaptive (optimized) PID control, including fast
response. and linear ramp-up and/or ramp-down control characteristics.
Calibration Selection
Select one of 6 calibrations via Brooks Expert Support Tool (BEST) or
digital signal (See communications protocol for your digital coms). Analog
devices can be switched via voltage signals to Pin 11 & 8 on Firmware
Version 1.18 & newer.
Selectable Soft Start
Processes requiring injection of gases can be adversely affected by
excessive initial gas flow. This abrupt injection of gas can result in process
damage from explosion or initial pressure impact. These problems are
virtually eliminated with the soft start feature.
Figure 1-1 General Wiring
PC-based Support Tools
Brooks Instrument offers a variety of PC-based process control and service
tools to meet the needs of our customers. Smart Interface may be used with
any unit supporting RS485 S-Protocol in a multidrop configuration, thus
allowing users to control and monitor their Brooks devices. The Brooks
Expert Support Tool (BEST) may be used to monitor, diagnose, tune and
calibrate Brooks devices equipped with DeviceNet communications. The
Brooks Expert Support Tool interfaces with Brooks products via a special
service port.
1-7
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure 1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5 % Per Second Setpoint Change
Figure 1-2 Response Performance of Brooks Digital MFC
Linear ramp-up or ramp-up/down (Figure 1-3) set by user via software
tools or digital commands.
Linear ramp-up/ramp-down is adjustable at 200% per second down to
0.5% per second setpoint change.
1-8
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
RS485 Communications
The Brooks Digital Series is equipped with RS485 communication
capability. Refer to Figure 1-4 (Analog I/O pin connections), that enables
the device to communicate via a personal computer for process control.
Baud rate selections for the Brooks Digital Series related to RS485 are:
1200, 2400, 4800, 9600, 19200 and 38400 baud and can be selected via
the Brooks Expert Support Tool (BEST) .
The RS485 is essentially a multidrop connection. It allows a maximum of
32 devices to be connected to a computer system. Personal computers are
not equipped with RS485 ports as standard. An RS232/USB to RS485
converter or RS485 interface board is therefore required to connect an
RS485 network to a standard personal computer. The RS485 bus, a daisy
chain network, meaning that the wires are connected at the units as in Figure 1-1.
Figure 1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts
Function PIN
Setpoint: Common Input (-) 1
Flow Signal: 0(1) -5 Vdc, 0-10 Vdc (Option), Output (+) 2
TTL Alarm: Open collector, Output (+) 3
Flow Signal: 0(4)-20 mA, Output (+) 4
Power Supply: +13.5 Vdc to +27 Vdc(+) 5
Not Connected 6
Setpoint: 0(4)-20 mA, Input (+) 7
Setpoint: 0(1)-5 Vdc, 0-10 Vdc, Input (+) 8
Power Supply: Common (-) 9
Flow Signal: Common, Output, (-) 10
Not Connected 11
Valve Override: Input 12
Auxilliary: RT Input, 0-5 Vdc, 0-10 Vdc, Input (+) 13
RS-485: Common B (-) 14
RS-485: Common A (+) 15
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
1-9
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure 1-5 SLA5800 Series Profibus Connections and Pinouts
Profibus Communications
The Brooks SLA5800 is now equipped to support the Profibus
communication protocol. Profibus is a fieldbus-based automation
standard of Profibus and Profinet International (PI). Via a single bus
cable, Profibus links controller or control systems with decentralized field
devices (sensors and actuators) on the field level and also enables
consistent data exchange with higher ranking communication systems. A
9-pin sub-D connector is included on every device and is galvanic
isolated from the main electronics as defined by the EN 50170 Profibus
standard to allow easy network connection separate from the main
connector. The main 15-pin sub-D connector or termination board is still
needed for the power supply, but also allows for the standard analog I/O
signals, analog valve override, and (open-collector) alarm signaling to be
used separate from the network connection.
The communication electronics allows for automatic baud rate detection
ranging from 9600 baud to 12 Mbaud, thus making the need for any
hardware baud rate selection methods not required. For selecting the
device address, which must be unique on the network, two rotary
switches are provided. This allows a user to easily select any address
number ranging from 0 to 126. This can provide fast device replacement
without complex network configurations. The Profibus-DP piggyback
board is equipped with a zero command pushbutton, allowing the user to
give a manual command to the device to (re)balance the flow sensor
electronics. This command can also be issued through the protocol.
The Profibus-DP communication option supports the following message types:
• Cyclic data exchange (Write/Read data).
• Read inputs (e.g. status, flow, temperature, totalizer, etc.).
• Read outputs (e.g. commands, setpoint).
• Global control commands (e.g. fail safe, sync).
• Get configuration (i.e. read number of I/O bytes and composition).
• Read diagnostics information (i.e. get error and alarm status).
Set parameters (i.e. select gas number, engineering units, I/O configuration
Set parameters (i.e. select gas number, engineering units, I/O
configuration etc.).
• Check configuration (i.e. check I/O composition).
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
1-10
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
DeviceNet Communications
The Brooks SLA5800 Digital Series is also available with DeviceNet
TM
communication capability. DeviceNet is an open digital protocol capable of
high speeds and easy system connectivity. Brooks Instrument has several
of its devices available on this popular networking standard, and is a
member of ODVA
TM
(Open DeviceNet Vendors Association), the governing
standard body for DeviceNet.
DeviceNet
is similar to the RS485 standard in that it is a multi-drop connection
that allows a maximum of 64 devices to be connected on the same network.
Baud rate selections for DeviceNet
products are 125K, 250K and 500K and
can be selected via a rate switch mounted on the device.
The DeviceNet
communication link also provides access to many of the
Brooks SLAMf Digital Series functions for “control and monitor” operations,
including:
Accurate setpoint adjustment and flow output measurement (including
units of measure selection)
PID Settings (controller only)
Valve Override (controller only)
Calibration Gas Select
Soft Start Control (controller only)
Figure 1-6 SLA5800 Series DeviceNet Connection and Pinouts
1-11
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
EtherCAT Communications
Brooks lnstrument now introduces the state-of-the-art EtherCAT
communications interface on its SLA Enhanced Series platform.
Many applications of Flow Controllers/Meters are moving to increase the
use of automation. Automation comes in many forms including Ethernet
based field buses. Digital communications from these varied systems and
the devices they measure and control, are a very effective means of not
only accomplishing more effective and rapid system integration, but also
providing greatly improved system diagnostics and maintainability.
EtherCAT is an Ethernet based communication system and is known for its
high cycle time and cost efficient cabling and master application solutions.
The available physical interfaces on the EtherCAT device are listed below:
5 pin M8 threaded male connector for power and Analog l/O, indicated by “pwr”.
• ln and Out ports with RJ-45 connectors.
• 2.5mm female jack for RS485 diagnostic port indicated by “DlAG” (refer
to the SLA 5800 Series installation and operation manual for more details)
The EtherCAT communication option supports the following message types:
• Cyclic data exchange (Read/Write data)
• Read lnputs (e.g. status, flow, temperature, actuator drive value, etc.)
• Read Outputs (e.g. commands, setpoint, actuator override, etc.)
• Read Diagnostics information (warning & alarm status)
• Check Device configuration
• Calibration due status
• Hardware/Software versions etc.
Figure 1-7 SLA5800 Series EtherCAT Connection and Pinouts
1-12
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure1-8 Dimensions - Model SLA5850, Thru-Flow, RS485
Figure 1-9 Dimensions - Model SLA5850, Downport, RS485
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
1-13
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure 1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT
Figure 1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
Note: Aux Input is used for Remote Transducer Pressure Controllers only.
1-14
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Figure 1-12 Dimensions - Model SLA5860, Thru-Flow, Profibus
Figure 1-13 Dimensions - Model SLA5860, Thru-Flow, RS485
Note: Aux Input is used for Remote
Transducer Pressure Controllers only.
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Brooks SLA5851 Instrucțiuni de utilizare

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Instrucțiuni de utilizare
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