Brooks GF80 Instrucțiuni de utilizare

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Brooks

®

GF80/GF81 Series

MultiFlo

TM

Capable

Digital Thermal Mass Flow Devices

Brooks

®

GF80/GF81 Series available with RS485, DeviceNet

TM

, Profibus

®

or EtherCAT

®

I/O

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Brooks

®

GF80/GF81 Devices

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas

and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various

industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical

instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com.

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Brooks

®

GF80/GF81 Devices

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

i

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Contents

Paragraph Page

Number Number

Section 1 Introduction

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ................................................................................................................ 1-1

1-3 Product Support References ......................................................................................................... 1-2

1-4 Warning, Caution and Notice Statements ...................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a GF80/GF81 Series Device.................................................................................... 1-2

1-7 Industry Standard References .......................................................................................................1-2

1-8 GF80 Series Gas Table.................................................................................................................. 1-3

1-9 Glossary of Terms and Acronyms .................................................................................................. 1-3

1-10 Description .................................................................................................................................... 1-5

1-10 Product Description for GF81 Devices ..........................................................................................1-7

1-11 Specifications for GF80/GF81 Series Devices .............................................................................. 1-7

Section 2 Installation

2-1 General..........................................................................................................................................2-1

2-2 Receipt of Equipment .................................................................................................................... 2-1

2-3 Recommended Storage Practice ................................................................................................... 2-2

2-4 Return Shipment ............................................................................................................................ 2-2

2-5 Transit Precautions........................................................................................................................ 2-2

2-6 Removal from Storage ...................................................................................................................2-2

2-7 Gas Connections ........................................................................................................................... 2-3

2-8 In-Line Filter ..................................................................................................................................2-3

2-9 Mechanical Installation ..................................................................................................................2-3

2-10 Flow Controller Installation Arrangement ........................................................................................ 2-4

2-11 Purge the Gas Supply Line Before GF80/GF81 Series Installation................................................ 2-5

2-12 Position and Mount the GF80/GF81 Series ................................................................................... 2-6

2-13 Perform a Leak Test ...................................................................................................................... 2-6

2-14 Performance Checks.....................................................................................................................2-6

2-15 Zeroing Setup Process .................................................................................................................. 2-6

2-16 Zeroing the GF80/GF81 Series......................................................................................................2-7

2-17 Auto Shut-Off................................................................................................................................. 2-7

2-18 Using the MultiFlo

TM

Configurator .................................................................................................. 2-8

2-19 Electrical Connections.................................................................................................................. 2-10

2-19-1 DeviceNet Connections ................................................................................................................ 2-10

2-19-2 Analog/RS485 Connector ............................................................................................................. 2-11

2-19-3 Profibus Connections ................................................................................................................... 2-12

2-19-4 EtherCAT Connections ................................................................................................................. 2-12

2-19-5 Alarm Output (Analog I/O Version Only) ....................................................................................... 2-13

Section 3 Operation

3-1 General..........................................................................................................................................3-1

3-2 Theory of Operation for Flow Measurement................................................................................... 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview ........................................................................................................................................ 4-1

4-2 Maintenance .................................................................................................................................. 4-1

4-3 Troubleshooting ............................................................................................................................. 4-2

4-4 Troubleshooting Checklist .............................................................................................................. 4-3

4-5 GF80/GF81 Series Troubleshooting Guide .................................................................................... 4-4

Section 5 Product Description Code ......................................................................................................5-1

ii

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Contents

Appendix A: GF80 Series Gas Table .......................................................................................................A-1

Appendix B: GF80/GF81 Series Patents................................................................................................B-1

Appendix C: Essential Instructions ....................................................................................................... C-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figure Page

Number Number

1-1 GF80/GF81 Series Digital Thermal Mass Flow Devices................................................................. 1-1

1-2 Dimensions - GF80 Series ........................................................................................................... 1-10

1-3 Dimensions - GF81 Series ........................................................................................................... 1-10

2-1 Typical Gas Supply Arrangement................................................................................................... 2-4

2-2 Zero Button Accessible at Top of Device ....................................................................................... 2-7

2-3 MultiFlo Cable Adapter...................................................................................................................2-9

2-4 RS485-USB Converter (P/N 214F027AAA) ................................................................................... 2-9

2-5 Diagnostic Port.............................................................................................................................. 2-9

2-6 GF80/GF81 Series DeviceNet Connection and Pin-Outs.............................................................. 2-10

2-7 GF80/GF81 Series with 15-Pin Analog Connector and Pin-Outs.................................................. 2-11

2-8 GF80/GF81 Series Profibus Connections and Pin-Outs...............................................................2-12

2-9 GF80 Series EtherCAT Connections and Pin-Outs ......................................................................2-12

2-10 Alarm Output Schematic ...............................................................................................................2-13

3-1 GF80/GF81 Series Operating Principles ....................................................................................... 3-2

Table Page

Number Number

1-1 Industry Standard References .......................................................................................................1-3

1-2 Terms and Acronyms ..................................................................................................................... 1-4

1-3 Specifications for Standard GF80/GF81 Series............................................................................. 1-8

1-4 Electrical Specifications for GF80/GF81 Series ............................................................................ 1-9

2-1 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ..................................................... 2-10

4-1 Environmental Factors ................................................................................................................... 4-3

4-2 GF80/GF81 Series Troubleshooting Guide .................................................................................... 4-4

5-1 GF80 Series Product Description Code Table ............................................................................... 5-1

5-2 GF81 Series Product Description Code Table ............................................................................... 5-3

A-1 GF80 Series Gas Table - Codes 1-94, Bins SA40 to SA44 ...........................................................A-1

A-2 GF80 Series Gas Table - Codes 1-94, Bins SA45 to SA50 ...........................................................A-2

A-3 GF80 Series Gas Table - Codes 97-606, Bins SA40 to SA44 .......................................................A-3

A-4 GF80 Series Gas Table - Codes 97-606, Bins SA45 to SA50 .......................................................A-4

A-5 GF80 Series Gas Table - Codes 607-926, Bins SA40 to SA44 .....................................................A-5

A-6 GF80 Series Gas Table - Codes 607-926, Bins SA45 to SA50 .....................................................A-6

A-7 GF80 Series Gas Table - Codes 927-5022, Bins SA40 to SA44 ...................................................A-7

A-8 GF80 Series Gas Table - Codes 927-5022, Bins SA45 to SA50 ...................................................A-8

B-1 GF80/GF81 Series Patents............................................................................................................B-1

1-1

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

1-1 Introduction

Based upon Brooks award-winning GF100 Series, the GF80/GF81 Series

is a performance/value MFC platform designed for OEM applications,

delivering the following class leading features:

• MultiFlo™ process gas and flow range programmability, enabling

customers to re-configure the MFC for new gases and full scale flow

rates for unparalleled process flexibility.

• A high-performance, corrosion-resistant flow measurement sensor

delivers improved reproducibility and stability.

• Metal seal MFCs (GF80/GF81) provide customers with maximum

durability and corrosion resistance for both aggressive and non-

aggressive gas applications.

• Full range of industrial communication protocols (DeviceNet, Profibus

DP-V1, and EtherCAT).

• An independent service/diagnostic port enables on-tool reconfiguration/

optimization, data logging, and troubleshooting without having to

remove the MFC from the gas line.

Figure 1-1 GF80 Series MultiFlo

TM

Capable Digital Thermal Mass Flow Devices

1-2 How to Use This Manual

This manual is intended to provide the user with all the information

necessary to install, operate, troubleshoot and maintain these thermal

mass flow devices. The manual is organized in the following sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A GF80 Series Gas Table

Appendix B GF80/GF81 Series Patents

Appendix C Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these devices.

1-2

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and service

locations and to obtain other documents that support the GF80/GF81

Series. Those documents include:

• Brooks MultiFlo

TM

Configurator Quick Start Manual

(X-SW-MultiFlo-Config-QS-eng; part number 541B167AAG)

• Brooks GF80/GF81 Series data sheet (DS-TMF-GF80-GF81-Series-

MFC-eng)

• DeviceNet

TM

Supplemental Manual for GF40/GF80/GF81 Series Mass

Flow Controllers and Meters

(X-DPT-DeviceNet-GF40-GF80-MFC-eng; part number 541B168AAG)

• Profibus

®

Supplemental Manual for Brooks

®

GF40/GF80/GF81 Series

Mass Flow Controllers and Meters

(X-DPT-Profibus-GF40-GF80-MFC-eng; part number 541B162AAG)

• RS485 Supplemental Manual for GF40/GF80/GF81 Series Mass Flow

Controllers and Meters

(X-DPT-RS485-GF40-GF80-MFC-eng; part number 541B169AAG)

• EtherCAT Supplemental Manual for Brooks

®

GF40/GF80 Series Mass

Flow Controllers and Meters

(X-DPT-EtherCAT-GF40-GF80-MFC-eng; part number 541B170AAG)

1-4 Warning, Caution and Notice Statements

Warning, caution and notice statements are located throughout this manual

in the ANSI format. A WARNING statement indicates a potentially

hazardous situation which, if not avoided, COULD result in death or serious

injury. A CAUTION statement indicates a potentially hazardous situation

which, if not avoided, MAY result in minor or moderate injury. It may also be

used to alert against unsafe practices. A NOTICE statement describes

specific information that requires special attention.

1-5 Product Warranty

Product warranty information can be found on the Back Cover of this

Manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers,

and applicable warranty periods according to product group.

1-6 How to Order a GF80/GF81 Series Device

Refer to Section 5.

1-3

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement

SEMI E12 Standard temperature and pressure

SEMI E16 Guideline for determining and describing MFC leak rates

SEMI E17 Guideline for MFC transient characteristics tests

SEMI E18 Guideline for temperature specifications of the MFC

SEMI E27 Standard for MFC and MFM linearity

SEMI E28 Guideline for pressure specifications for the MFC

SEMI E52 Practice for referencing gases used in digital MFCs

SEMI E54 Sensor actuator network connections for DeviceNet

SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs

SEMI E66 Test method for determining particle contribution by MFCs

SEMI E67 Test method for determining reliabilty of MFCs

SEMI E68 Test method for determining warm-up time of MFCs

SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs

SEMI E80 Test method for determining attitude sensitivity of MFCs

SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates

SEMI F36 Guide for dimensions and connections of gas distribution components

SEMI F44 Guideline for standardization of machined stainless steel weld fittings

SEMI F45 Guideline for standardization of machined stainless steel reducing fittings

SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity

SEMI S2 Environmental, Health and Safety Guidelines

SEMI S9 Dielectric testing

SEMI S10 Risk assessment

SEMI S12 Decontamination of fielded products

1-7 Industry Standard References

Refer to Table 1-1.

1-8 GF80 Devices Gas Table

Refer to Appendix A.

1-9 Glossary of Terms and Acronyms

Refer to Table 1-2

1-4

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

Term or Acronym Definition

CSR Customer Special Requirement.

CVD Chemical Vapor Deposition.

DSP Digital Signal Processor.

EPI Epitaxy (EPI). A process technology where a pure silicon

crystalline structure is deposited or “grown” on a

bare wafer, enabling a high-purity starting point

for building the semiconductor device.

HBD Horizontal Base Down.

HLD Horizontal Label Down.

HLU Horizontal Label Up.

HUD Horizontal Upside Down.

GF80 Series MultiFlo capable digital device.

GF81 Series High Flow Digital Device.

F.S. Full Scale.

LED Light Emitting Diode.

MFC Mass Flow Controller.

MultiFlo Configurator I/O communication software package that

configures gas and flow ranges.

MultiFlo Technology A physics-based calibration methodology that

enables gas and flow range configuration within

a defined standard configuration.

PID Proportional Integral Derivative Controller.

PSIA Pounds per Square Inch Absolute.

PSID Pounds per Square Inch Differential.

PSIG Pounds per Square Inch Gauge.

ROR As pressure increases, flow increases at a

pressure rate of rise, or ROR.

HC Standard Configuration w/ Hastelloy

®

sensors

(to reduce reaction to corrosive gases).

S.P. Setpoint.

Step Technology Enables fast set point control through a high

speed DSP.

VID Vertical mounting attitude with inlet side facing

down.

VIU Vertical mounting attitude with inlet side facing up.

Table 1-2 Terms and Acronyms

1-5

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

1-10 Description

Control

The GF80/GF81 Series brings together Brooks high-performance,

patented ultra-fast T-rise flow sensor, high-speed ARM based digital

architecture, and a fast-acting diaphragm-free solenoid valve to deliver:

• Fast reproducible transitions between setpoints without overshoot or

ringing

• User-programmable ramp functions for processes requiring a slow-

ramp in flow or time critical transitions

MultiFlo™ Gas and Range Configurability

The Brooks MultiFlo technology delivers exceptional improvement in

process gas accuracy for linear and non-linear gases. This is achieved

through advanced gas modeling and optimized through actual gas testing.

Brooks MultiFlo

TM

allows the device to be quickly and easily configured for

another gas and/or flow range without sacrificing accuracy or rangability.

Selecting a new gas automatically creates a new calibration curve,

establishes optimized PID settings for dynamic control, automatically

compensates for gas density effects, and ensures smooth overshoot-free

transitions between flow rates with excellent steady-state stability. Brooks

MultiFlo technology offers unparalleled flexibility. An extensive gas

database is provided and a single device can be quickly programmed for

thousands of different gas and flow range combinations. Process benefits

achieved include:

• Mass flow controller full scale full range can be rescaled down typically

by a factor of 3:1 with no impact on accuracy, turndown or leak by

specifications

• Optimum process and inventory flexibility resulting in dramatically

reduced inventory costs

• Fewer configurations/bin sizes required to support many different

processes

• Less down-time with rapid process recovery

MultiFlo

TM

Support References: Brooks MultiFlow Configurator Quick

Start Guide (X-SW-MultiFlo-Config-QS-eng [Part Number: 541B167AAG])

MultiFlo

TM

Configurator Accessory Kits:

MultiFlo kits are available in the following configurations:

778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

778Z012ZZZ GF0xx RS485 Analog/Profibus

®

MultiFlo

Configurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

641Z117AAA Power Supply 24 Vdc with DB-15 female

1-6

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

778Z013ZZZ GF0xx EtherCAT

®

MultiFlo

Configurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

641Z117AAA Power Supply 24 Vdc with DB-15 female

124Z170AAA Cable, Power, EtherCAT to DB-15 male

778Z014ZZZ GF0xx DeviceNet

TM

MultiFlo

Configurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

641Z117AAA Power Supply 24 Vdc with DB-15 female

124Z171AAA Cable, Power, DeviceNet to DB-15 male

* MultiFlo Configurator Software is available on the Brooks Instrument

website at: www.BrooksInstrument.com/MultiFlo

www.BrooksInstrument.com/Documentation&Downloads

Advanced Thermal Measurement Sensor

Brooks high-performance thermal flow sensor brings together key design

elements to deliver the accurate, repeatable measurement under

challenging process conditions:

• Improved accuracy at elevated temperatures through isothermal

packaging and ambient temperature sensing and compensation

• Enhanced signal-to-noise performance enables improved low setpoint

accuracy

• A large bore, corrosion resistant, Hastelloy

®

C-22 sensor tube ensures

long life and reliability

• Optimized temperature profile for gases prone to thermal decomposi-

tion

• Onboard electronics store sensor calibration data for ease of service

Enhanced Diagnostics and User Interface

The mass flow controller is typically the most complex and critical

component in a gas delivery system, When dealing with toxic or reactive

gases, removing the MFC to access its functionality should be the last

resort. To address this, Brooks GF Series devices include self-diagnostics

and an independent service port for in-situ device evaluation and

troubleshooting:

• Embedded self-test routines at power-up

• Independent RS485 service port that can be accessed while the MFC is

in operation for data logging and troubleshooting

• A convenient Zero button to enable easy re-zeroing during scheduled

maintenance

1-7

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

Communication Interfaces

The GF80/GF81 Series supports 0-5 Vdc, 0-10 Vdc, 4-20 mA, 0-20 mA,

RS485, DeviceNet, EtherCAT, and Profibus communication protocols.

DeviceNet, Profibus, EtherCAT and RS485 are multi-drop connections that

allow a maximum of 64 devices for DeviceNet, 128 devices for Profibus,

32 devices for RS485, and 65,535 devices for EtherCAT to be connected

on the same network.

Brooks Instruments' DeviceNet profile has been certified by the ODVA

(Open DeviceNet Vendor's Association).

Brooks Instrument Profibus interface has been certified by the PNO

(Profibus User Organization).

The Brooks Instrument EtherCAT interface has been successfully tested

by the EtherCAT Conformance Test application version 1.20.30.0.

1-11 Product Description for GF81 Series Devices

The Brooks GF81 Series is a high flow version of the GF80 featuring a

corrosion-resistant Hastelloy C-22 for durable, long term operation. Sub-1

second settling times and 1% of reading accuracy ensures that the GF81

will provide reliable flow measurement or control in demanding gas flow

applications. The GF81 achieves excellent internal to external leak integrity

for challenging process gases as found in CVD, solar, and other

processes. With a wide range of digital and analog I/O options available,

the GF81 represents an extremely powerful, yet easy, upgrade for existing

MFCs or MFMs.

1-12 Specifications for GF80/GF81 Series Devices

See Tables 1-3 thru 1-5 for specifications for the GF80/GF81 Series.

See Figures 1-2 thru 1-4 for dimensions for the GF80/GF81 Series.

1-8

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

Table 1-3 Specifications for Standard GF80/GF81 Series

GF80GF80

GF80

GF81GF81

GF81

MecMec

Mec

hanicalhanical

hanical

VV

V

alve alve

alve

TT

T

ypeype

ype Normally Closed, No Valve (Meter) Normally Closed, Meter

Primary Primary

Primary

WW

W

etted Materialsetted Materials

etted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS 316 Stainless Steel, Hastelloy C-22, KM45

External SealsExternal Seals

External Seals 316 Stainless Steel

InIn

In

ternal Seals/Vternal Seals/V

ternal Seals/V

alve Seatalve Seat

alve Seat 316 Stainless Steel

Surface FinishSurface Finish

Surface Finish 16μ inch Ra

PP

P

erformanceerformance

erformance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

22

2

Eq.) Eq.)

Eq.) 3 sccm to 55 slm 51 - 300 slm

Flow Flow

Flow

AccurAccur

Accur

acyacy

acy +1% S.P. 35-100%, +0.35% F.S. 2-35% +1% S.P. 35-100% , +0.35% F.S. 5-35%

Repeatability & ReprRepeatability & Repr

Repeatability & Repr

oducibilityoducibility

oducibility <

+ 0.2% S.P. 0.15% S.P.

LinearityLinearity

Linearity + 0.5% F.S. (included in accuracy)

Response Response

Response

Time (Settling Time (Settling

Time (Settling

Time)Time)

Time) Normally Closed Valve < 1 sec. < 1 second

(within 2% for steps 0-10 through 0-100%)

ConCon

Con

trtr

tr

ol Rangeol Range

ol Range 2-100% 5% - 100%

MultiFloMultiFlo

MultiFlo optional N/A

Number of BinsNumber of Bins

Number of Bins 11 bins 4 bins

VV

V

alve Shut Downalve Shut Down

alve Shut Down < 1% of F.S. <2% of Standard Configuration F.S. @ 30 N

2

psig/atm out

ZZ

Z

erer

er

o Stabilityo Stability

o Stability < + 0.5% F.S. per year

PrPr

Pr

essuressur

essur

e Coefficiene Coefficien

e Coefficien

tt

t 0.03% per psi (0-50psi N

2

)

AA

A

ttitude Sensitivityttitude Sensitivity

ttitude Sensitivity <0.25% span change @ 90

O

after rezeroing (N

2

@ 50 psi)

Auto ZAuto Z

Auto Z

erer

er

o:o:

o: Optional: (When Auto Zero is enabled the device performs the zero function once every time

the set point returns to zero. To accomplish, simply provide a zero set point.)

Auto shut-off:Auto shut-off:

Auto shut-off: The Auto Shut-off feature closes the GF80 valve The Auto Shut-off feature closes the GF81 valve

when the set point drops below 1.5% of full scale when the set point drops below 2% of full scale.

AA

A

vailable Gases:vailable Gases:

vailable Gases: MultiFlo Capable N

2

, H

2

, Ar, He, O

2

, NH

3

(consult factory for other gases)

RatingsRatings

Ratings

OperOper

Oper

ating ating

ating

TT

T

emperemper

emper

aturatur

atur

e Rangee Range

e Range 5-50

O

C (41-122

O

F)

Maximum OperMaximum Oper

Maximum Oper

ating Prating Pr

ating Pr

essuressur

essur

e*e*

e* 150 psig (10 bar) Controller: 75 psig (5 bar) / Meter: 150 psig (10 bar)

DifferDiffer

Differ

enen

en

tial Prtial Pr

tial Pr

essuressur

essur

e Range*e Range*

e Range* 3-860 sccm = 7-45 psid, 30 - 90 psid

861-7200 sccm = 15-45 psid,

7201-50000 sccm = 25-45 psid

Typical pressure drop, high density gases like Argon

gas applications require an additional

10 psid differential pressure

Leak InLeak In

Leak In

tegrity (External)tegrity (External)

tegrity (External) 1x10

-10

atm. cc/sec He

Diagnostics & DisplayDiagnostics & Display

Diagnostics & Display

Status Lights:Status Lights:

Status Lights: MFC Health, Network Status

Alarms*:Alarms*:

Alarms*: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic / Service PDiagnostic / Service P

Diagnostic / Service P

ort:ort:

ort: RS485 via 2.5mm jack

* Note: Application specific lower supply pressure and/or lower differential pressure operation available through Brooks Customer Special Request (CSR) process.

ComplianceCompliance

Compliance

EnEn

En

virvir

vir

onmenonmen

onmen

tal Compliance:tal Compliance:

tal Compliance: CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

RoHS

1-9

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

Table 1-4 GF80/GF81 Electrical Specifications

Communication PrCommunication Pr

Communication Pr

otocolotocol

otocol

RS485*RS485*

RS485*

PrPr

Pr

ofibusofibus

ofibus

®®

®

DeviceNetDeviceNet

DeviceNet

TMTM

TM

EtherCAEtherCA

EtherCA

TT

T

®®

®

Electrical ConnectionElectrical Connection

Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with

(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut/

Sub-D (B) 2 x RJ45

Analog I/OAnalog I/O

Analog I/O 0-5 V, 0-10 V, 0-5 V, 0-20 mA, 0-5 V

0-20 mA, 4-20 mA 4-20 mA

GF80 PGF80 P

GF80 P

ower Max./Purower Max./Pur

ower Max./Pur

gege

ge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to

+24 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt +25 Vdc: 13.6 Watt/15.0Watt +27 Vdc: 7 Watt/8 Watt

GF81 PGF81 P

GF81 P

ower Max./Purower Max./Pur

ower Max./Pur

gege

ge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to N/A

N/A +24 Vdc: 3.3 Watt/10.2 Watt +27 Vdc: 3.3 Watt/10.2 Watt +25 Vdc: 3.3 Watt/10.2 Watt

VV

V

oltage Set Poltage Set P

oltage Set P

oinoin

oin

t Input Specificationt Input Specification

t Input Specification

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A N/A

Full RangeFull Range

Full Range 0-11 Vdc 0-5.5 Vdc N/A N/A

Absolute Max.Absolute Max.

Absolute Max. 25 V (without damage) N/A N/A

Input ImpedenceInput Impedence

Input Impedence 192 kOhms N/A N/A

RequirRequir

Requir

ed Max. Sink Curred Max. Sink Curr

ed Max. Sink Curr

enen

en

tt

t 0.002 mA N/A N/A

CurrCurr

Curr

enen

en

t Set Pt Set P

t Set P

oinoin

oin

tt

t

Nominal RangeNominal Range

Nominal Range 4-20 mA or 0-20 mA N/A N/A

Full RangeFull Range

Full Range 0-22 mA N/A N/A

Absolute Max.Absolute Max.

Absolute Max. 25 mA (without damage) N/A N/A

Input ImpedenceInput Impedence

Input Impedence 250 Ohms 125 Ohms N/A N/A

Flow Output (VFlow Output (V

Flow Output (V

oltage) Specificationsoltage) Specifications

oltage) Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A 0-5 Vdc

Full RangeFull Range

Full Range (-0.5)-11 Vdc 0-5.5 Vdc - (-0.5)-5.5 Vdc

Min Load ResistanceMin Load Resistance

Min Load Resistance 1 kOhms 1 kOhms - 0.5 kOhms

Flow Output (CurrFlow Output (Curr

Flow Output (Curr

enen

en

t) Specificationst) Specifications

t) Specifications

Nominal RangeNominal Range

Nominal Range 0-20 mA or 4-20 mA N/A N/A

Full RangeFull Range

Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A

Max. LoadMax. Load

Max. Load 400 Ohms (for supply voltage: 12-24 Vdc N/A N/A

Analog I/O Analog I/O

Analog I/O

Alarm Ouput**Alarm Ouput**

Alarm Ouput**

TT

T

ypeype

ype Open Collector N/A N/A

Max. Closed (On) CurrMax. Closed (On) Curr

Max. Closed (On) Curr

enen

en

tt

t 25 mA N/A N/A

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Leakage 1μA N/A N/A

Max. Open (Off) Max. Open (Off)

Max. Open (Off)

VV

V

oltageoltage

oltage 30 Vdc N/A N/A

Analog I/O Analog I/O

Analog I/O

VV

V

alve Override Signal Specifications***alve Override Signal Specifications***

alve Override Signal Specifications***

Floating/UnconnectedFloating/Unconnected

Floating/Unconnected Instrument controls valve to command set point N/A N/A

VV

V

OR < 1.40 OR < 1.40

OR < 1.40

VV

V

dcdc

dc Valve Closed N/A N/A

1.70 1.70

1.70

VV

V

dc < dc <

dc <

VV

V

OR < 2.90 OR < 2.90

OR < 2.90

VV

V

dcdc

dc Valve Normal N/A N/A

VV

V

OR > 3.20 OR > 3.20

OR > 3.20

VV

V

dcdc

dc Valve Open N/A N/A

Input ImpedenceInput Impedence

Input Impedence 800 kOhms N/A N/A

Absolute Max. InputAbsolute Max. Input

Absolute Max. Input

(-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A

*There are three (3) RS485 Protocols:

S-Protocol is a RS485 communication based on HART

®

command set.

L-Protocol is a RS485 communication compatible with legacy Unit

®

and Celerity

®

devices.

A-Protocol is a RS485 communication compatible with Aera

®

mass flow devices.

**The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one of various alarm

conditions.

*** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon the measured reading as shown in

this section.

1-10

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 1 Introduction

Figure 1-3 Dimensions - GF81 Series

Figure 1-2 Dimensions - GF80 Series

GF80 ConGF80 Con

GF80 Con

figurfigur

figur

ationsations

ations

GF81 ConGF81 Con

GF81 Con

figurfigur

figur

ationsations

ations

2-1

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 2 Installation

2-1 General

This section provides installation instructions for the Brooks GF80/GF81

Series Thermal Mass Flow Devices. The installation process consists of

purging the gas supply line prior to installation, unpacking and inspecting

the device, connecting the device to the gas supply line and testing for

leaks.

2-2 Receipt of Equipment

When the instrument is received, the outside packing case should be checked

for damage incurred during shipment. If the packing case is damaged, the local

carrier should be notified at once regarding their liability. A report should be

submitted to your nearest Product Service Department.

Americas: Asia, Japan:

Brooks Instrument Brooks Instrument

407 W. Vine Street 1-4-4 Kitsuna, Koto-ku

P.O. Box 903 Tokyo 136-0073

Hatfield, PA 19440 USA Japan

Toll Free (888) 554 FLOW (3569) Tel 81 (3) 5633-7104

Tel (215) 362 3700

Fax (215) 362 3745 Brooks Instrument Korea, Ltd.

E-mail: BrooksAm@BrooksInstrument.com D-406 Bundang Techno Park 151

www.BrooksInstrument.com Sungnam, Kyungki-do, 463-070

Korea

Europe, Middle East, Africa: Tel +82 31 708 2522

Brooks Instrument B.V.

Neonstraat 3, P.O. Box 428 Brooks Instrument (Shanghai) Co. LTD

6710 BX Ede RM 203, Bldg 6

Netherlands NO 1888 Xin Jin Qiao Rd

Tel +31 (0) 318 549292 or Jinqiao E.P.Z. Pudong

+31 (0) 318 549291 Shanghai 201206

E-mail: service.coordinator@Brooks Instrument.com China

Tel 86-21-3895-4788

Brooks Instrument GmbH

Zur Wetterwarte 50 Haus 377/B,

01109 Dresden

Germany

Tel +49 (0) 351 215 20 442

E-mail: service.coordinatorDD@Brooks Instrument.com

In case you need technical assistance:

USA 888 275 8946 Korea +82 31 708 2521

Netherlands +31 (0) 318 549290 Taiwan +886 3 5590 988

Germany +49 351 215 2040 China +86 21 5079 8828

Japan +81 3 5633 7100 Singapore +6297 9741

2-2

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 2 Installation

Remove the envelope containing the packing list. Outside of your clean area,

carefully remove the equipment from the packing case. Make sure spare

parts are not discarded with the packing material. Inspect the contents for

damaged or missing parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of the device is required, it is

recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

7°C (45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 Return Shipment

Prior to returning any device to the factory, visit the Brooks web site

(www.BrooksInstrument.com) for a Return Materials Authorization Number

(RMA#), or contact one of the locations provided on p. 2-1.

Prior to returning the device, it must be purged in accordance with the

following:

All flow devices returned to Brooks require completion of Form RPR003-2,

Brooks Instrument Decontamination Statement, along with a Material

Safety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failure

to provide this information will delay processing by Brooks personnel.

Copies of these forms can be downloaded from the Brooks website

(www.BrooksInstrument.com) or are available from any of the Brooks

Instrument locations provided on p. 2-1.

2-5 Transit Precautions

To safeguard against damage during transit, transport the device to the

installation site in the same container used for transportation from the

factory, if circumstances permit.

2-6 Removal from Storage

Upon removal of the device from storage, a visual inspection should be

conducted to verify its "as-received" condition. If the device has been

subject to storage conditions in excess of those recommended (refer to

"2-3 Recommended Storage Practice" on p. 2-1), it should be subjected to

2-3

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 2 Installation

a pneumatic pressure test in accordance with applicable vessel codes. To

maintain a device's clean integrity, this service should be performed by the

factory or one of the certified service centers.

2-7 Gas Connections

Prior to installation, ensure that all piping is clean and free from

obstructions. Install piping in such a manner that permits easy access to

the device if removal becomes necessary.

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the device

to prevent the possibility of any foreign material entering the flow sensor or

control valve. The filtering element should be replaced periodically or

ultrasonically cleaned.

2-9 Mechanical Installation

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively free

from shock and vibration.

• Leave sufficient room for access to the user interface and MAC

ID and baud rate switches (if equipped) at the top of the device.

• Install the device in such a manner that permits easy purge and removal

if the device requires servicing.

The GF80 Series also utilizes MultiFlo

®

technology that allows the user to

configure standard configurations or "blanks" for a variety of pure gases

and mixtures. As a result, MultiFlo

®

technology enables the user to reduce

unique inventory requirements.

2-4

Brooks

®

GF80/GF81 Devices

Installation and Operation Manual

X-TMF-GF80-GF81-Series-MFC-eng

Part Number: 541B196AAG

September, 2014

Section 2 Installation

2-10 Flow Controller Installation Arrangement

Typical gas supply arrangements are shown in Figure 2-1. GF80s/GF81s

are often arranged inside a gas panel. Configure standard configurations

or "blanks" for a variety of pure gases and mixtures. As a result, MultiFlo

technology enables the user to reduce unique inventory requirements.

Figure 2-1 Typical Gas Supply Arrangement

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