Brooks GF40 Instrucțiuni de utilizare

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Brooks

®

GF40 Series

MultiFlo

TM

Capable, Elastomer Seal,

Digital, Thermal Mass Flow Devices

Brooks

®

GF40 Series available with DeviceNet

TM

, RS485, Profibus

®

or EtherCAT

®

I/O

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Brooks

®

GF40 Devices

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas

and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various

industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical

instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com.

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Brooks

®

GF40 Devices

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

i

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Contents

Paragraph Page

Number Number

Section 1 Introduction

1-1 Introduction ................................................................................................................................... 1-1

1-2 How to Use This Manual ............................................................................................................... 1-1

1-3 Product Support References.........................................................................................................1-2

1-4 Warning, Caution and Notice Statements ..................................................................................... 1-2

1-5 Product Warranty .......................................................................................................................... 1-2

1-6 How to Order a GF40 Series Device............................................................................................. 1-2

1-7 Industry Standard References....................................................................................................... 1-2

1-8 GF40 Series Gas Table................................................................................................................. 1-3

1-9 Glossary of Terms and Acronyms ................................................................................................. 1-3

1-10 Description ....................................................................................................................................1-5

1-11 Specifications for GF40 Series Devices ........................................................................................ 1-7

Section 2 Installation

2-1 General ......................................................................................................................................... 2-1

2-2 Receipt of Equipment.................................................................................................................... 2-1

2-3 Recommended Storage Practice .................................................................................................. 2-1

2-4 Return Shipment ...........................................................................................................................2-1

2-5 Transit Precautions ....................................................................................................................... 2-2

2-6 Removal from Storage ..................................................................................................................2-2

2-7 Gas Connections...........................................................................................................................2-2

2-8 In-Line Filter .................................................................................................................................. 2-2

2-9 Mechanical Installation ..................................................................................................................2-2

2-10 Flow Controller Installation Arrangement ...................................................................................... 2-3

2-11 Purge the Gas Supply Line Before GF40 Series Installation......................................................... 2-4

2-12 Position and Mount the GF40 Series ............................................................................................ 2-5

2-13 Perform a Leak Test......................................................................................................................2-5

2-14 Performance Checks .................................................................................................................... 2-5

2-15 Zeroing Setup Process..................................................................................................................2-5

2-16 Zeroing the GF40 Series ............................................................................................................... 2-6

2-17 Auto Shut-Off ................................................................................................................................ 2-6

2-18 Using the MultiFlo

TM

Configurator.................................................................................................. 2-7

2-19 Electrical Connections................................................................................................................... 2-9

2-19-1 DeviceNet Connections................................................................................................................. 2-9

2-19-2 Analog/RS485 Connector.............................................................................................................2-10

2-19-3 Profibus Connections ................................................................................................................... 2-11

2-19-4 EtherCAT Connections................................................................................................................. 2-11

2-19-5 Alarm Output (Analog I/O Version Only) ...................................................................................... 2-12

Section 3 Operation

3-1 General ......................................................................................................................................... 3-1

3-2 Theory of Operation for Flow Measurement ................................................................................. 3-1

Section 4 Maintenance & Troubleshooting

4-1 Overview ....................................................................................................................................... 4-1

4-2 Maintenance.................................................................................................................................. 4-1

4-3 Troubleshooting............................................................................................................................. 4-2

4-4 Troubleshooting Checklist.............................................................................................................4-3

4-5 GF40 Series Troubleshooting Guide ............................................................................................. 4-4

Section 5 Product Description Code ......................................................................................................5-1

ii

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Contents

Appendix A: GF40 Series Gas Table .......................................................................................................A-1

Appendix B: GF40 Series Patents...........................................................................................................B-1

Appendix C: Essential Instructions ....................................................................................................... C-1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figure Page

Number Number

1-1 GF40 Series Digital Thermal Mass Flow Devices .........................................................................1-1

1-2 Dimensions - GF40 Series........................................................................................................... 1-11

2-1 Typical Gas Supply Arrangement ..................................................................................................2-3

2-2 Zero Button Accessible at Top of Device.......................................................................................2-6

2-3 MultiFlo Cable Adapter ..................................................................................................................2-8

2-4 USB-RS485 Converter (P/N 214F027AAA) ..................................................................................2-8

2-5 Diagnostic Port..............................................................................................................................2-9

2-6 GF40 Series DeviceNet Connection and Pin-Outs........................................................................2-9

2-7 GF40 Series with 15-Pin Analog Connector and Pin-Outs ........................................................... 2-10

2-8 GF40 Series Profibus Connections and Pin-Outs ........................................................................ 2-11

2-9 GF40 Series EtherCAT Connections and Pin-Outs...................................................................... 2-11

2-10 Alarm Output Schematic .............................................................................................................. 2-12

3-1 GF40 Series Operating Principles.................................................................................................3-2

Table Page

Number Number

1-1 Industry Standard References.......................................................................................................1-3

1-2 Terms and Acronyms ....................................................................................................................1-4

1-3 Specifications for Standard GF40 Series ...................................................................................... 1-8

1-4 GF40 Series Electrical Specifications .......................................................................................... 1-10

2-1 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent .................................................... 2-8

4-1 Environmental Factors ..................................................................................................................4-3

4-2 GF40 Series Troubleshooting Guide ............................................................................................. 4-4

5-1 GF40 Series Product Description Code Table............................................................................... 5-1

A-1 GF40 Series Gas Table - Codes 1-102, Bins SA40 to SA44.........................................................A-1

A-2 GF40 Series Gas Table - Codes 1-102, Bins SA45 to SA50.........................................................A-2

A-3 GF40 Series Gas Table - Codes 104-636, Bins SA40 to SA44 .....................................................A-3

A-4 GF40 Series Gas Table - Codes 104-636, Bins SA45 to SA50 .....................................................A-4

A-5 GF40 Series Gas Table - Codes 640-948, Bins SA40 to SA44 .....................................................A-5

A-6 GF40 Series Gas Table - Codes 640-948, Bins SA45 to SA50 .....................................................A-6

A-7 GF40 Series Gas Table - Codes 949-5022, Bins SA40 to SA44 ...................................................A-5

A-8 GF40 Series Gas Table - Codes 949-5022, Bins SA45 to SA50 ...................................................A-6

B-1 GF40 Series Patents.....................................................................................................................B-1

1-1

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

1-1 Introduction

Based upon Brooks award-winning GF100 Series, the GF40 Series is a

performance/value MFC platform designed for OEM applications,

delivering the following class leading features:

• MultiFlo™ process gas and flow range programmability, enabling

customers to re-configure the MFC for new gases and full scale flow

rates for unparalleled process flexibility.

• A high-performance, corrosion-resistant flow measurement sensor

delivers improved reproducibility and stability.

• A variety of elastomer options enable customers to select the optimum

and most cost effective mix of products for their application.

• Full range of industrial communication protocols (DeviceNet, Profibus

DP-V1, and EtherCAT).

• An independent service/diagnostic port enables on-tool reconfiguration/

optimization, data logging, and troubleshooting without having to

remove the MFC from the gas line.

Figure 1-1 GF40 Series MultiFlo

TM

Capable Digital Thermal Mass Flow Devices

1-2 How to Use This Manual

This manual is intended to provide the user with all the information

necessary to install, operate, troubleshoot and maintain these thermal

mass flow devices. The manual is organized in the following sections:

Section 1 Introduction

Section 2 Installation

Section 3 Operation

Section 4 Maintenance and Troubleshooting

Section 5 Product Description Code

Appendix A GF40 Series Gas Table

Appendix B GF40 Series Patents

Appendix C Essential Instructions

Warranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attempting

to operate or repair these devices.

1-2

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and service

locations and to obtain other documents that support the GF40 Series.

Those documents include:

• Brooks MultiFlo

TM

Configurator Quick Start Manual

(X-SW-MultiFlo-Config-QS-eng; part number 541B167AAG)

• Brooks GF40 Series data sheet (DS-TMF-GF40-Series-MFC-eng)

• DeviceNet

TM

Supplemental Manual for GF40/GF80/GF81 Series Mass

Flow Controllers and Meters

(X-DPT-DeviceNet-GF40-GF80-MFC-eng; part number 541B168AAG)

• Profibus

®

Supplemental Manual for Brooks

®

GF40/GF80/GF81 Series

Mass Flow Controllers and Meters

(X-DPT-Profibus-GF40-GF80-MFC-eng; part number 541B162AAG)

• RS485 Supplemental Manual for GF40/GF80/GF81 Series Mass Flow

Controllers and Meters

(X-DPT-RS485-GF40-GF80-MFC-eng; part number 541B169AAG)

• EtherCAT Supplemental Manual for Brooks

®

GF40/GF80 Series Mass

Flow Controllers and Meters

(X-DPT-EtherCAT-GF40-GF80-MFC-eng; part number 541B170AAG)

1-4 Warning, Caution and Notice Statements

Warning, caution and notice statements are located throughout this manual

in the ANSI format. A WARNING statement indicates a potentially

hazardous situation which, if not avoided, COULD result in death or serious

injury. A CAUTION statement indicates a potentially hazardous situation

which, if not avoided, MAY result in minor or moderate injury. It may also be

used to alert against unsafe practices. A NOTICE statement describes

specific information that requires special attention.

1-5 Product Warranty

Product warranty information can be found on the Back Cover of this

Manual and on the Brooks website at www.BrooksInstrument.com. This

information provides general warranty information, limitations, disclaimers,

and applicable warranty periods according to product group.

1-6 How to Order a GF40 Series Device

Refer to Section 5.

1-3

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

Table 1-1 Industry Standard References

Reference Number Reference Description

MIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test Requirement

SEMI E12 Standard temperature and pressure

SEMI E16 Guideline for determining and describing MFC leak rates

SEMI E17 Guideline for MFC transient characteristics tests

SEMI E18 Guideline for temperature specifications of the MFC

SEMI E27 Standard for MFC and MFM linearity

SEMI E28 Guideline for pressure specifications for the MFC

SEMI E52 Practice for referencing gases used in digital MFCs

SEMI E54 Sensor actuator network connections for DeviceNet

SEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCs

SEMI E66 Test method for determining particle contribution by MFCs

SEMI E67 Test method for determining reliabilty of MFCs

SEMI E68 Test method for determining warm-up time of MFCs

SEMI E69 Test method for reproducibilty and zero drift for thermal MFCs

SEMI E80 Test method for determining attitude sensitivity of MFCs

SEMI E16-90 Guidelines for determining and describing mass flow controllers leak rates

SEMI F36 Guide for dimensions and connections of gas distribution components

SEMI F44 Guideline for standardization of machined stainless steel weld fittings

SEMI F45 Guideline for standardization of machined stainless steel reducing fittings

SEMI F47 Specifications for semiconductor processing equipment

voltage sag immunity

SEMI S2 Environmental, Health and Safety Guidelines

SEMI S9 Dielectric testing

SEMI S10 Risk assessment

SEMI S12 Decontamination of fielded products

1-7 Industry Standard References

Refer to Table 1-1.

1-8 GF40 Devices Gas Table

Refer to Appendix A.

1-9 Glossary of Terms and Acronyms

Refer to Table 1-2

1-4

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

Term or Acronym Definition

CSR Customer Special Requirement.

CVD Chemical Vapor Deposition.

DSP Digital Signal Processor.

EPI Epitaxy (EPI). A process technology where a pure silicon

crystalline structure is deposited or “grown” on a

bare wafer, enabling a high-purity starting point

for building the semiconductor device.

HBD Horizontal Base Down.

HLD Horizontal Label Down.

HLU Horizontal Label Up.

HUD Horizontal Upside Down.

GF40 Series MultiFlo capable digital device.

F.S. Full Scale.

LED Light Emitting Diode.

MFC Mass Flow Controller.

MultiFlo Configurator I/O communication software package that

configures gas and flow ranges.

MultiFlo Technology A physics-based calibration methodology that

enables gas and flow range configuration within

a defined standard configuration.

PID Proportional Integral Derivative Controller.

PSIA Pounds per Square Inch Absolute.

PSID Pounds per Square Inch Differential.

PSIG Pounds per Square Inch Gauge.

ROR As pressure increases, flow increases at a

pressure rate of rise, or ROR.

HC Standard Configuration w/ Hastelloy

®

sensors

(to reduce reaction to corrosive gases).

S.P. Setpoint.

Step Technology Enables fast set point control through a high

speed DSP.

VID Vertical mounting attitude with inlet side facing

down.

VIU Vertical mounting attitude with inlet side facing up.

Table 1-2 Terms and Acronyms

1-5

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

1-10 Description

Control

The GF40 Series brings together Brooks high-performance, patented ultra-

fast T-rise flow sensor, high-speed ARM based digital architecture, and a

fast-acting diaphragm-free solenoid valve to deliver:

• Fast reproducible transitions between setpoints without overshoot or

ringing

• User-programmable ramp functions for processes requiring a slow-

ramp in flow or time critical transitions

• Optional bubble tight shut down (elastomer valve seat)

MultiFlo™ Gas and Range Configurability

The Brooks MultiFlo technology delivers exceptional improvement in

process gas accuracy for linear and non-linear gases. This is achieved

through advanced gas modeling and optimized through actual gas testing.

Brooks MultiFlo

TM

allows the device to be quickly and easily configured for

another gas and/or flow range without sacrificing accuracy or rangability.

Selecting a new gas automatically creates a new calibration curve,

establishes optimized PID settings for dynamic control, automatically

compensates for gas density effects, and ensures smooth overshoot-free

transitions between flow rates with excellent steady-state stability. Brooks

MultiFlo technology offers unparalleled flexibility. An extensive gas

database is provided and a single device can be quickly programmed for

thousands of different gas and flow range combinations. Process benefits

achieved include:

• Mass flow controller full scale full range can be rescaled down typically

by a factor of 3:1 with no impact on accuracy, turndown or leak by

specifications

• Optimum process and inventory flexibility resulting in dramatically

reduced inventory costs

• Fewer configurations/bin sizes required to support many different

processes

• Less down-time with rapid process recovery

MultiFlo

TM

Support References: Brooks MultiFlow Configurator Quick

Start Guide (X-SW-MultiFlo-Config-QS-eng [Part Number: 541B167AAG])

MultiFlo

TM

Configurator Accessory Kits:

MultiFlo kits are available in the following configurations:

778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

778Z012ZZZ GF0xx RS485 Analog/Profibus

®

MultiFlo

Configurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

641Z117AAA Power Supply 24 Vdc with DB-15 female

1-6

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

778Z013ZZZ GF0xx EtherCAT

®

MultiFlo

Configurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

641Z117AAA Power Supply 24 Vdc with DB-15 female

124Z170AAA Cable, Power, EtherCAT to DB-15 male

778Z014ZZZ GF0xx DeviceNet

TM

MultiFlo

Configurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm

214F027AAA USB-RS485 converter with DB-9 female

641Z117AAA Power Supply 24 Vdc with DB-15 female

124Z171AAA Cable, Power, DeviceNet to DB-15 male

* MultiFlo Configurator Software is available on the Brooks Instrument

website at: www.BrooksInstrument.com/MultiFlo

www.BrooksInstrument.com/Documentation&Downloads

Advanced Thermal Measurement Sensor

Brooks high-performance thermal flow sensor brings together key design

elements to deliver the accurate, repeatable measurement under

challenging process conditions:

• Improved accuracy at elevated temperatures through isothermal

packaging and ambient temperature sensing and compensation

• Enhanced signal-to-noise performance enables improved low setpoint

accuracy

• A large bore, corrosion resistant, Hastelloy

®

C-22 sensor tube ensures

long life and reliability

• Optimized temperature profile for gases prone to thermal decomposition

• Onboard electronics store sensor calibration data for ease of service

Extensive Mechanical Configurations

GF40

1/4'' VCR

9/16'' - 18 UNF

1/8'' tube compression

1/4'' tube compression

3/8'' tube compression

1/2'' tube compression

6-mm tube compression

10-mm tube compression

1/4'' RC

1/4'' VCO

1/4'' NPT

1-7

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

Enhanced Diagnostics and User Interface

The mass flow controller is typically the most complex and critical

component in a gas delivery system, When dealing with toxic or reactive

gases, removing the MFC to access its functionality should be the last

resort. To address this, Brooks GF Series devices include self-diagnostics

and an independent service port for in-situ device evaluation and

troubleshooting:

• Embedded self-test routines at power-up

• Independent RS485 service port that can be accessed while the MFC is

in operation for data logging and troubleshooting

• A convenient Zero button to enable easy re-zeroing during scheduled

maintenance

Communication Interfaces

The GF40 Series supports 0-5 Vdc, 0-10 V, 4-20 mA, 0-20 mA, RS485,

DeviceNet, EtherCAT, and Profibus communication protocols. DeviceNet,

Profibus, EtherCAT and RS485 are multi-drop connections that allow a

maximum of 64 devices for DeviceNet, 128 devices for Profibus, 32

devices for RS485, and 65,535 devices for EtherCAT to be connected on

the same network.

Brooks Instruments' DeviceNet profile has been certified by the ODVA

(Open DeviceNet Vendor's Association).

Brooks Instrument Profibus interface has been certified by the PNO

(Profibus User Organization).

The Brooks Instrument EtherCAT interface has been successfully tested

by the EtherCAT Conformance Test application version 1.20.30.0.

1-11 Specifications for GF40 Series Devices

See Table 1-3 for specifications for the GF40 Series.

See Figure 1-2 for dimensions for the GF40 Series.

1-8

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

Table 1-3 Specifications for Standard GF40 Series

GF40GF40

GF40

MechanicalMechanical

Mechanical

Valve TypeValve Type

Valve Type Normally Closed, Normally Open, No Valve (Meter)

Primary Wetted MaterialsPrimary Wetted Materials

Primary Wetted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS

External SealsExternal Seals

External Seals Viton, Buna, Kalrez, EPDM or Neoprene

Internal Seals/Valve SeatInternal Seals/Valve Seat

Internal Seals/Valve Seat Viton, Buna, Kalrez, EPDM or Neoprene

Surface FinishSurface Finish

Surface Finish 32μ inch Ra

RatingsRatings

Ratings

Operating Temperature RangeOperating Temperature Range

Operating Temperature Range 5-50

O

C (41-122

O

F)

Maximum Operating PressureMaximum Operating Pressure

Maximum Operating Pressure 150 psig (10 bar)

Design Proof PressureDesign Proof Pressure

Design Proof Pressure 4000 psig (275 bar)

Differential Pressure RangeDifferential Pressure Range

Differential Pressure Range 3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid

Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure

Leak Integrity (External)Leak Integrity (External)

Leak Integrity (External) 1x10

-9

atm. cc/sec He

PerformancePerformance

Performance

Full Scale Flow Range (NFull Scale Flow Range (N

Full Scale Flow Range (N

22

2

Eq.) Eq.)

Eq.) 3 sccm to 50 slm

Flow AccuracyFlow Accuracy

Flow Accuracy

+1% S.P. 35-100%, +0.35% F.S. 2-35%

Repeatability & ReproducibilityRepeatability & Reproducibility

Repeatability & Reproducibility <

+ 0.2% S.P.

LinearityLinearity

Linearity

+ 0.5% F.S. (included in accuracy)

Response Time (Settling Time)Response Time (Settling Time)

Response Time (Settling Time) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)

Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)

Control RangeControl Range

Control Range 2-100%

MultiFloMultiFlo

MultiFlo optional

Number of BinsNumber of Bins

Number of Bins 10 bins

Valve Shut DownValve Shut Down

Valve Shut Down < 1% of F.S.

Zero StabilityZero Stability

Zero Stability <

+ 0.5% F.S. per year

Pressure CoefficientPressure Coefficient

Pressure Coefficient 0.03% per psi (0-50psi N

2

)

Attitude SensitivityAttitude Sensitivity

Attitude Sensitivity <0.25% span change @ 90

O

after rezeroing (N

2

@ 50 psi)

Auto Zero:Auto Zero:

Auto Zero: Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to

zero. To accomplish, simply provide a zero set point.)

Auto shut-off:Auto shut-off:

Auto shut-off: The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale

ComplianceCompliance

Compliance

Environmental Compliance:Environmental Compliance:

Environmental Compliance: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1

RoHS

General, Leak-Test Traceability, Oxygen Cleaning, Calibration Traceability, Material Certification

1-9

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

Table 1-4 GF40 Series Electrical Specifications

Communication ProtocolCommunication Protocol

Communication Protocol

RS485*RS485*

RS485*

ProfibusProfibus

Profibus

®®

®

DeviceNetDeviceNet

DeviceNet

TMTM

TM

EtherCATEtherCAT

EtherCAT

®®

®

Electrical ConnectionElectrical Connection

Electrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with

(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut/

Sub-D (B) 2 x RJ45

Analog I/OAnalog I/O

Analog I/O 0-5 V, 0-10 V, 0-5 V, 0-20 mA, 0-5 V 0-5 V

0-20 mA, 4-20 mA 4-20 mA (Output only) (Output only)

GF40 Power Max./PurgeGF40 Power Max./Purge

GF40 Power Max./Purge From +12 Vdc to From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to

+24 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt +25 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt

Voltage Set Point Input SpecificationVoltage Set Point Input Specification

Voltage Set Point Input Specification

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A N/A

Full RangeFull Range

Full Range 0-11 Vdc 0-5.5 Vdc N/A N/A

Absolute Max.Absolute Max.

Absolute Max. 25 V (without damage) N/A N/A

Input ImpedenceInput Impedence

Input Impedence 192 kOhms N/A N/A

Required Max. Sink CurrentRequired Max. Sink Current

Required Max. Sink Current 0.002 mA N/A N/A

Current Set PointCurrent Set Point

Current Set Point

Nominal RangeNominal Range

Nominal Range 4-20 mA or 0-20 mA N/A N/A

Full RangeFull Range

Full Range 0-22 mA N/A N/A

Absolute Max.Absolute Max.

Absolute Max. 25 mA (without damage) N/A N/A

Input ImpedenceInput Impedence

Input Impedence 250 Ohms 125 Ohms N/A N/A

Flow Output (Voltage) SpecificationsFlow Output (Voltage) Specifications

Flow Output (Voltage) Specifications

Nominal RangeNominal Range

Nominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc

Full RangeFull Range

Full Range (-0.5)-11 Vdc 0-5.5 Vdc (-0.5)-5.5 Vdc

Min Load ResistanceMin Load Resistance

Min Load Resistance 1 kOhms 1 kOhms 0.5 kOhms

Flow Output (Current) SpecificationsFlow Output (Current) Specifications

Flow Output (Current) Specifications

Nominal RangeNominal Range

Nominal Range 0-20 mA or 4-20 mA N/A N/A

Full RangeFull Range

Full Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A

Max. LoadMax. Load

Max. Load 400 Ohms (for supply voltage: 12-24 Vdc N/A N/A

Analog I/O Alarm Ouput**Analog I/O Alarm Ouput**

Analog I/O Alarm Ouput**

TypeType

Type Open Collector N/A N/A

Max. Closed (On) CurrentMax. Closed (On) Current

Max. Closed (On) Current 25 mA N/A N/A

Max. Open (Off) LeakageMax. Open (Off) Leakage

Max. Open (Off) Leakage 1μA N/A N/A

Max. Open (Off) VoltageMax. Open (Off) Voltage

Max. Open (Off) Voltage 30 Vdc N/A N/A

Analog I/O Valve Override Signal Specifications***Analog I/O Valve Override Signal Specifications***

Analog I/O Valve Override Signal Specifications***

Floating/UnconnectedFloating/Unconnected

Floating/Unconnected Instrument controls valve to command set point N/A N/A

VOR < 1.40 VdcVOR < 1.40 Vdc

VOR < 1.40 Vdc Valve Closed N/A N/A

1.70 Vdc < VOR < 2.90 Vdc1.70 Vdc < VOR < 2.90 Vdc

1.70 Vdc < VOR < 2.90 Vdc Valve Normal N/A N/A

VOR > 3.20 VdcVOR > 3.20 Vdc

VOR > 3.20 Vdc Valve Open N/A N/A

Input ImpedenceInput Impedence

Input Impedence 800 kOhms N/A N/A

Absolute Max. InputAbsolute Max. Input

Absolute Max. Input

(-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A

*There are three (3) RS485 Protocols:

S-Protocol is a RS485 communication based on HART

®

command set.

L-Protocol is a RS485 communication compatible with legacy Unit

®

and Celerity

®

devices.

A-Protocol is a RS485 communication compatible with Aera

®

mass flow devices.

**The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one of

various alarm conditions.

*** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon the

measured reading as shown in this section.

1-10

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 1 Introduction

Figure 1-2 Dimensions - GF40 Series

2-1

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 2 Installation

2-1 General

This section provides installation instructions for the Brooks GF40 Series

Thermal Mass Flow Devices. The installation process consists of purging

the gas supply line prior to installation, unpacking and inspecting the

device, connecting the device to the gas supply line and testing for leaks.

2-2 Receipt of Equipment

When the equipment is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is

damaged, the local carrier should be notified at once regarding his liability.

A report should be submitted to the nearest Brooks Instrument location

listed on the Global Service Network page on our website:

BrooksInstrument.com/GlobalSupportCenters

Carefully remove the equipment from the packing case. Make sure spare

parts are not discarded with the packing material. Inspect the contents for

damaged or missing parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of the device is required, it is

recommended that it be stored in accordance with the following conditions:

• Within the original shipping container.

• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

7°C (45°F) minimum.

• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 Return Shipment

Prior to returning any instrument to the factory for any reason, visit our

website for instructions on how to obtain a Return Materials Authorization

Number (RMA #) and complete a Decontamination Statement to

accompany it: BrooksInstrument.com/Service. All instruments returned to

Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s)

used in the instrument. Failure to provide this information will delay

processing of the instrument.

Instrument must have been purged in accordance with the following:

2-2

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 2 Installation

2-5 Transit Precautions

To safeguard against damage during transit, transport the device to the

installation site in the same container used for transportation from the

factory, if circumstances permit.

2-6 Removal from Storage

Upon removal of the device from storage, a visual inspection should be

conducted to verify its "as-received" condition. If the device has been

subject to storage conditions in excess of those recommended (refer to

"2-3 Recommended Storage Practice"), it should be subjected to a

pneumatic pressure test in accordance with applicable vessel codes. To

maintain a device's clean integrity, this service should be performed by

the factory or one of the certified service centers.

2-7 Gas Connections

Prior to installation, ensure that all piping is clean and free from

obstructions. Install piping in such a manner that permits easy access to

the device if removal becomes necessary.

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the

device to prevent the possibility of any foreign material entering the flow

sensor or control valve. The filtering element should be replaced

periodically or ultrasonically cleaned.

2-9 Mechanical Installation

The recommended installation procedure guidelines are as follows:

• The device should be located in a clean, dry atmosphere relatively

free from shock and vibration.

• Leave sufficient room for access to the user interface and MAC

ID and baud rate switches (if equipped) at the top of the device.

• Install the device in such a manner that permits easy purge and

removal if the device requires servicing.

2-3

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 2 Installation

The GF40 Series also utilizes MultiFlo

®

technology that allows the user to

configure standard configurations ("SAs") or "blanks" for a variety of pure

gases and mixtures. As a result, MultiFlo

®

technology enables the user to

reduce unique inventory requirements.

2-10 Flow Controller Installation Arrangement

Typical gas supply arrangements are shown in Figure 2-1. GF40s are often

arranged inside a gas panel. Configure standard configurations ("SAs") or

"blanks" for a variety of pure gases and mixtures. As a result, MultiFlo

technology enables the user to reduce unique inventory requirements.

Figure 2-1 Typical Gas Supply Arrangement

2-4

Brooks

®

GF40 Devices

Installation and Operation Manual

X-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAG

October, 2017

Section 2 Installation

2-11 Purge the Gas Supply Line Before GF40 Series Installation

Before operating the GF40 Series, the gas supply line must be completely

purged with nitrogen or argon to ensure the line is free from toxic or

flammable gases, contaminants, moisture, and oxygen. The purge gas

must be free of moisture and oxygen to less than 100 ppb. Purge the gas

lines as follows or in accordance with prescribed company and safety

procedures.

1. Shut off the process gas supply valve(s) upstream of the GF40 Series.

If such a valve is not available, shut the valve on the gas panel. Tag the

valve at this point to prevent accidental re-exposure of the process gas

to the gas line.

2. Cycle purge the gas line with dry nitrogen or argon to fully flush out the

process gas. Cycle purging consists of evacuating to a low pressure

adequate to induce out-gassing and then purging to remove adhered

moisture and oxygen. If a toxic or reactive gas is present and a clogged

GF40 Series is suspected, then proceed with caution. Pump down and

purge the GF40 Series from both downstream and upstream lines. If

check valves are present in the gas line, both pumping down and

purging are required. Pumping down without purging is inadequate. If a

good vacuum source is not available, the GF40 Series can be de-

contaminated by purge only.

3. Repeat the purge cycle several times within 2-4 hours to complete the

cleaning. For toxic and corrosive gasses, it is recommended to use

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